By Kiyotaka Wasa
This completely up-to-date re-creation comprises a completely new crew of contributing authors with backgrounds focusing on a number of the new functions of sputtering know-how. It kinds a bridge among primary thought and useful software, giving an perception into cutting edge new fabrics, units and systems.
Organized into 3 elements for ease of use, this guide introduces the basics of skinny motion pictures and sputtering deposition, explores the idea and practices of this box, and likewise covers new expertise corresponding to nano-functional fabrics and MEMS.
Wide different types of sensible skinny movie fabrics and processing are defined, and experimental information is supplied with distinctive examples and theoretical descriptions.
- A robust purposes concentration, overlaying present and rising applied sciences, together with nano-materials and MEMS (microelectrolmechanical structures) for power, environments, communications, and/or bio-medical box. New chapters on machine simulation of sputtering and MEMS completes the replace and insures that the recent version comprises the most up-tp-date and forward-looking assurance available
- All functions mentioned are supported through theoretical discussions, delivering readers either the "how" and the "why" of every technique
- 40% revision: the recent version contains a completely new workforce of contributing authors with backgrounds focusing on a number of the new purposes which are coated within the ebook and delivering the main updated assurance to be had anywhere
Read Online or Download Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS PDF
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Additional info for Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS by Kiyotaka Wasa